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KLA-TENCOR SpectraFx 200 Thin Film Metrology Tool; Mfd. in March 2007, Unit was never used * Measures Thickness & Refractive Index of Single & Multi Layer Films * Spectroscopic Ellipsometry from 230nm-900nm * Summit Software version 4.60.31 * Wafer Chuck for up to 300mm Wafers * Dual Loading Platforms for 200mm Open Cassettes * Optical Wafer Flat/Notchfinder * 92 WHP Throughput for Montor Wafers * 66 WHP Throughput for Patterned Wafers * Baseline Wafer Set for Toll Calibration * Input Voltage 208VAC; 50/60 Hz The free listing tool. List your items fast and easy and manage your active items. (Kla-tencor spectrafx 200 thin film metrology tool is the responsibility of Lela Joyner) |
l.joyner@cedar--rapids.com (Lela Joyner) for more information.
