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1ea Asyst Mod. 300FL SMIF system: Dims (unpacked) 18.5"W x 23"D x 54"H, weight 125 lbs. We have reason to believe this unit is New/Unused, but have listed it as used. From the manufacturer's website: The first 300mm load port to comply with all of the latest SEMI and I300I industry guidelines, the 300FL is compatible with all standard 300mm unified wafer pods-25 wafer pods and 13 wafer pods. The system maintains a better-than-Class 1 environment while transferring 300mm wafers into a load-lock chamber, utilizing an optional fan filter unit. In addition, the 300FL allows optimized operator and wafer protection with its wafer protrusion sensor and human obstruction sensor. The 300FL offers direct, adjustable bolt-on interface per SEMI standards. Asyst has also developed an optional base to allow fast access to the front of the tool and support software integration and development prior to completion of the tool's frame. The 300FL's robust structure will ensure interface to tool alignment, wafer precision and port seal integrity. Packing charge: Domestic USA $75, Crating USA or International $150 More detailed pictures are available upon request. (Asyst 300FL smif for 300MM/12" wafers is the responsibility of Nadine Underwood) |
n_underwood@cedar--rapids.com (Nadine Underwood) for more information.
