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SVG 90S PDPI Polymide Coater Developer Track 200mm The SVG track computer powers up and initializes, but overall it may need some servicing to get the system fully operational. Two Millipore photo resist pumps are in the system along with controllers and a remote keypad. The track has four wafer coat modules and six of the 9039 modules. * Module 9039, Part No: 99-42281-01 (qty. 6) * 9038S/9037S, Part No: 99-543130-01-001 (qty 2) * 9044S, Part No: 99-543130-03-001 * 9026, Part No: 99-39984-06 * 9032, Part No: 99-47988-01 * Microbar Trackmate with Millipore pumps * SVG Fluid Temperature Controller * GPI, General Precision Incorporated Temperature/Humidity Controller SEMICONDUCTOR EQUIPMENT SPARES Monday – Friday: 8:30 AM - 5:00 PM Mountain Standard Time (MST) Closed Saturday, Sunday and all major US holidays. SEMICONDUCTOR EQUIPMENT SPARES (Svg 90S pdpi polymide coater developer track 200MM is the responsibility of Lucile Gomez) |
l_gomez@cedar--rapids.com (Lucile Gomez) for more information.
