MKS GBROR (gas box Rate of Rise) In Situ flow verifier with MKS controller Model #117861-G1 instrument is used to verify MFC accuracy and repeatability in situ with cabling and Cart, Used, powers up as seen in the picture. MFC in the picture is not included. (Mks 117861-G1 and mks gbror in situ flow verifier is the responsibility of Yvonne Parker) |
Y.parker@cedar--rapids.com (Yvonne Parker)
for more information.