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This appears to be a brand new, never-used gas box from a LAM A6 Alliance Etcher. It was likely intended for an Exelan chamber but could have other applications as well. The original Part Number is 850-442010-001.
(Lam gas box A6 alliance exelan 850-442010-001 etch is the responsibility of Lizzie Prince) |
lprince@cedar--rapids.com (Lizzie Prince) for more information.
